4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Vacuum arc discharge coating

Waldemar Gotze

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Method of and device for providing thin layers by cathode sputte

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent

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Method of manufacturing a mask for radiation lithography

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Profile ID: LFUS-PAI-P-890387

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