4. Electric resistance heating devices
  5. Heating devices
  6. Radiant heater

WaferMasters

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Focused photon energy heating chamber

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Selective heating using flash anneal

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2834885

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