4. Abrading
  5. Precision device or process - or with condition responsive...
  6. With indicating

W. Jarrett Campbell

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Method and apparatus for controlling within-wafer uniformity...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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System and method for controlling critical dimension in a...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate

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System and method for controlling polysilicon feature...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate

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System and method for estimating error in a manufacturing...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Wafer-less qualification of a processing tool

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2023756

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