4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

W. Derek Buckley

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Apparatus for effecting alignment and spacing control of a mask

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Electron emitter assembly

Electric lamp and discharge devices: systems – With cathode or cathode heater supply circuit – Plural cathodes or heaters in the load device
Patent

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Illumination system for x-ray lithography

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Production of X-ray lithograph masks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Profile ID: LFUS-PAI-P-968295

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