4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Vinita Singh

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Method for cleaning a process chamber

Cleaning and liquid contact with solids – Processes – Gas or vapor condensation or absorption on work
Reexamination Certificate

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Use of cyclic siloxanes for hardness improvement of low k...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2777341

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