Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
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Advanced BEOL interconnect structures with low-k PE CVD cap...
Advanced BEOL interconnect structures with low-k PE CVD cap...
Bilayer HDP CVD/PE CVD cap in advance BEOL interconnect...
Bilayer HDP CVD/PE CVD cap in advanced BEOL interconnect...
Hybrid dielectric structure for improving the stiffness of...
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