4. Semiconductor device manufacturing: process
  5. Making device or circuit responsive to nonelectrical signal
  6. Physical stress responsive

Vincent Larrey

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Heterogeneous substrate including a sacrificial layer, and a...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Method of fabricating a MEMS/NEMS electromechanical component

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Method of fabricating an electromechanical device including...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2262350

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