4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Vinay Pohray

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Lag control

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for patterning multilevel interconnects

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Trench etch process for low-k dielectrics

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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Trench etch process for low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2685999

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