4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Vijayakumar S. Ramachandrarao

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Adhesion of carbon doped oxides by silanization

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Controlled use of photochemically susceptible chemistries...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Enhancing photoresist performance using electric fields

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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Enhancing photoresist performance using electric fields

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Filling small dimension vias using supercritical carbon dioxide

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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