4. Coating processes
  5. Electrical product produced
  6. Integrated circuit, printed circuit, or circuit board

Victor Y. Lu

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CVD flowable gap fill

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
Reexamination Certificate

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Porogens for porous silica dielectric for integral circuit...

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2418251

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