Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Reexamination Certificate
2008-06-03
2008-06-03
Cameron, Erma (Department: 1792)
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
C427S243000, C427S244000, C427S245000, C427S246000, C427S247000, C427S387000
Reexamination Certificate
active
07381442
ABSTRACT:
The invention relates to the production of nanoporous silica dielectric films and to semiconductor devices and integrated circuits comprising these improved films. The nanoporous films of the invention are prepared using silicon containing pre-polymers and are prepared by a process that allows crosslinking at lowered gel temperatures by means of a metal-ion-free onium or nucleophile catalyst.
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Deng Eric
Leung Roger Y.
Lu Victor Y.
Xie Songyuan
Cameron Erma
Honeywell International , Inc.
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