4. Organic compounds -- part of the class 532-570 series
  5. Organic compounds
  6. Silicon containing

Veronika Szalai

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Compounds useful as chemical precursors in chemical vapor deposi

Organic compounds -- part of the class 532-570 series – Organic compounds – Silicon containing
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CVD of silicon-based ceramic materials on internal surface of a

Coating processes – Interior of hollow article coating – Coating by vapor – gas – mist – or smoke
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