4. Scanning-probe techniques or apparatus; applications of scanning
  5. Scanning or positioning arrangements, i.e., arrangements for...
  6. Fine scanning or positioning

Veeco Metrology Inc.

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Method and apparatus of automatic scanning probe imaging

Scanning-probe techniques or apparatus; applications of scanning – Scanning or positioning arrangements – i.e. – arrangements for... – Fine scanning or positioning
Reexamination Certificate

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Systems and methods for utilizing scanning probe shape...

Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate

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