Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2006-12-22
2009-08-25
Noland, Thomas P (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
C073S001890, C702S034000, C702S104000, C977S878000, C977S881000
Reexamination Certificate
active
07578176
ABSTRACT:
A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.
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Bao Tianming
Dahlen Gregory A.
Jain Rohit
Liu Hao-Chih
Noland Thomas P
Patterson, Thunte, Skaar & Christensen, P.A.
Veeco Metrology Inc.
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