Method and apparatus of automatic scanning probe imaging

Details Method and apparatus of automatic scanning probe imaging Method and apparatus of automatic scanning probe imaging

2011-01-04

2011-01-04

Berman, Jack I (Department: 2881)

Scanning-probe techniques or apparatus; applications of scanning

Scanning or positioning arrangements, i.e., arrangements for...

Fine scanning or positioning

C850S010000, C850S011000, C977S850000

Reexamination Certificate

active

07865966

ABSTRACT:
A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.

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