4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Valli Arunachalam

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Method and apparatus for forming a layer on a substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Method and apparatus for forming a layer on a substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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