4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Valentin Todorow

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Method and apparatus for tuning an RF matching network in a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of fabricating a high dielectric constant transistor...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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