4. Electric heating
  5. Metal heating
  6. By arc

Unryu Ogawa

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Plasma processing apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the...
Reexamination Certificate

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Plasma processing system

Electric heating – Metal heating – By arc
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Semiconductor device producing method and semiconductor...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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Substrate processing method and substrate processing apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-2430599

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