4. Abrading
  5. Work holder
  6. Work rotating

United Microelectric Corp.

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Manufacturing method of static random access memory

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Polishing head with a floating knife-edge

Abrading – Work holder – Work rotating
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Silicon oxide gap-filling process

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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