4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Metal coating

Ulrich Kroemer

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Cyclical deposition of tungsten nitride for metal oxide gate...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate

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Cyclical deposition of tungsten nitride for metal oxide gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Tungsten nitride atomic layer deposition processes

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Tungsten nitride atomic layer deposition processes

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Tungsten nitride atomic layer deposition processes

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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