4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Tzu-Hsin Huang

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Arc chamber for ion implanter

Radiant energy – Ion generation – Arc type
Patent

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Non-sticking semi-conductor wafer clamp and method of making sam

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Upper lid alignment apparatus for hatchback reaction cabin

Joints and connections – With adjunctive protector – broken parts retainer – repair,... – Position or guide means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-691118

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