4. Semiconductor device manufacturing: process
  5. Making passive device
  6. Stacked capacitor

Turgut Sahin

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Anneal for enhancing the electrical characteristic of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Apparatus for exposing a substrate to plasma radicals

Coating apparatus – Gas or vapor deposition – With treating means
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Chamber seasoning method to improve adhesion of F-containing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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CVD deposition method to improve adhesion of F-containing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Deposition reactor having vaporizing, mixing and cleaning...

Coating apparatus – Gas or vapor deposition
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Profile ID: LFUS-PAI-P-321437

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