4. Thermal measuring and testing
  5. Temperature measurement
  6. Nonelectrical, nonmagnetic, or nonmechanical temperature...

Tuqiang Ni

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Apparatus for detecting the endpoint of a photoresist...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Configurable plasma volume etch chamber

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
Reexamination Certificate

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Elevated stationary uniformity ring design

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Etch endpoint detection

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Gas injection system for plasma processing

Coating apparatus – Gas or vapor deposition – With treating means
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Profile ID: LFUS-PAI-P-442997

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