4. Compositions: ceramic
  5. Ceramic compositions
  6. Carbide or oxycarbide containing

Tsunehiko Nakamura

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Heater, wafer heating apparatus and method for manufacturing...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Non-magnetic ceramics for recording/reproducing heads and method

Compositions: ceramic – Ceramic compositions – Carbide or oxycarbide containing
Patent

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Wafer heating apparatus

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1499459

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