4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Toshiyuki Suemitsu

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Magnetron sputtering apparatus and method

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Method for forming thin film, spheroid coated with thin...

Stock material or miscellaneous articles – Nonrectangular sheet
Reexamination Certificate

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Method for forming thin film, spheroid coated with thin...

Coating processes – Spraying – Moving the base
Reexamination Certificate

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Method for forming thin film, spheroid coated with thin...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Method for making soft magnetic film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-849448

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