4. Metal treatment
  5. Compositions
  6. Heat treating

Toshinobu Yanase

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Method for fabricating semi-conductor devices

Metal treatment – Compositions – Heat treating
Patent

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Vertical apparatus for heat treating a semiconductor substrate

Drying and gas or vapor contact with solids – Apparatus – Houses – kilns – and containers
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Profile ID: LFUS-PAI-P-1661015

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