4. Electric heating
  5. Heating devices
  6. Combined with container, enclosure, or support for material...

Toshimitsu Miyata

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Method for use in manufacturing a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Semiconductor producing device and semiconductor device...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Substrate processing apparatus, heating apparatus for use in...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – By differential heating
Reexamination Certificate

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Vacuum heating furnace with tapered portion

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Vacuum heating furnace with tapered portion

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Patent

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Profile ID: LFUS-PAI-P-1402719

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