4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Toshimitsu Kohara

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Magnetron sputtering apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Method for preparing alumna coating film having alpha-type...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Multilayer coating excellent in wear resistance and heat...

Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate

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Multilayer film formed body

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
Reexamination Certificate

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Multilayered film having excellent wear resistance, heat...

Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Physical dimension specified
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1129318

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