4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Toshiki Oono

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Centrifugal dryer, manufacturing method for semiconductor...

Drying and gas or vapor contact with solids – Apparatus – With apparatus using centrifugal force
Reexamination Certificate

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Defect inspecting device for substrate to be processed and...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Gas analyzing method and gas analyzer for semiconductor treater

Optics: measuring and testing – For light transmission or absorption – Of fluent material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2708500

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