Charged particle beam apparatus

Details Charged particle beam apparatus Charged particle beam apparatus

2006-10-31

2009-11-10

Souw, Bernard E (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S492100, C313S007000, C313S311000, C313S545000, C313S561000, C417S048000, C417S051000

Reexamination Certificate

active

07615765

ABSTRACT:
There is provided a compact charged particle beam apparatus with a non-evaporable getter pump which maintains high vacuum even during emission of an electron beam without generating foreign particles. The apparatus comprises: a charged particle source; a charged particle optics which focuses a charged particle beam emitted from the charged particle source on a sample and performs scanning; and means of vacuum pumping which evacuates the charged particle optics. The means of vacuum pumping has a differential pumping structure with two or more vacuum chambers connected through an opening in series. A pump made of non-evaporable getter alloy is placed in an upstream vacuum chamber with a high degree of vacuum, and a gas absorbing surface of the non-evaporable getter alloy is fixed without contact with another part.

REFERENCES:
patent: 4833362 (1989-05-01), Crewe
patent: 7053589 (2006-05-01), Gabrys et al.
patent: 2004/0051507 (2004-03-01), Gabrys et al.
patent: 2005/0052103 (2005-03-01), Katagiri et al.
patent: 2007/0102650 (2007-05-01), Katagiri et al.
patent: 2008/0315122 (2008-12-01), Katagiri et al.
patent: 6-111745 (1994-04-01), None
patent: 2000-149850 (2000-05-01), None
patent: 2002-358920 (2002-12-01), None
patent: 2004-202309 (2004-07-01), None

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