4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Toshiaki Hongoh

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Electrostatic chuck device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Flat antenna having openings provided with conductive...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Flat antenna having rounded slot openings and plasma...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method and apparatus for forming insulating layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Microwave plasma processing apparatus for controlling a...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-565490

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