4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Toru Kagaya

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Method of producing a semiconductor device

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Substrate processing apparatus and reaction container

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Substrate processing apparatus and reaction container

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Vertical type semiconductor device producing apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2321874

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