4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Tomohide Jozaki

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Electrostatic chucking device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Lot management production method and product carrying container

Receptacles – Sectional – Stacked or aligned similar sections
Reexamination Certificate

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Lot management production method and product carrying container

Metal working – Method of mechanical manufacture
Reexamination Certificate

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Method and apparatus for dry etching

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Method and apparatus for dry etching with temperature control

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-450703

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