4. Semiconductor device manufacturing: process
  5. Repair or restoration

Tomoharu Fujiwara

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Charged-particle-beam microlithography apparatus including...

Radiant energy – Means to align or position an object relative to a source or...
Reexamination Certificate

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Charged-particle-beam microlithography methods including...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Divided reticles for charged-particle-beam microlithography...

Radiant energy – Irradiation of objects or material
Reexamination Certificate

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Electrostatic wafer chucks and charged-particle-beam...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Exposure method and device manufacturing method

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Profile ID: LFUS-PAI-P-2087993

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