4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Tokyo Electron Yamanashi Limited

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Anisotropic etching method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Anisotropic etching method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Apparatus for detecting and aligning a substrate

Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
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Apparatus for optically reading and discriminating symbols or ch

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
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Apparatus for testing IC elements

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
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