Data processing: generic control systems or specific application – Specific application – apparatus or process – Specific application of temperature responsive control system
Reexamination Certificate
2006-08-01
2006-08-01
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Specific application of temperature responsive control system
C700S301000, C700S276000, C073S708000, C361S283100
Reexamination Certificate
active
07085628
ABSTRACT:
A pressure sensor, a pressure control apparatus, and a flow rate control apparatus are provided to automatically correct temperature drift of the pressure sensor and accurately detect pressure despite changes in temperature. An embodiment includes an upstream side pressure sensor between an orifice and a control valve, to control flow rate through the orifice by a regulating control valve, while calculating the flow from the upstream side pressure. With a temperature sensor, a memory means, and a temperature drift correcting means which calculates drift of the upstream side pressure sensor from data in the memory means when the temperature of the fluid changes and offsets the output drift of the upstream side pressure sensor with the calculated amount of the output drift, temperature drift of the pressure sensor is automatically corrected, enabling accurate control of flow rate.
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International Search Report for PCT/JP02/12251, completed Jan. 6, 2003, and mailed Jan. 21, 2003, from the Japanese Patent Office.
First page of WO 03/058187 A1 (international publication corresponding to PCT/JP02/12251).
Dohi Ryousuke
Ikeda Nobukazu
Matsumoto Atsushi
Nakamura Osamu
Nishino Kouji
Fujikin Incorporated
Griffin & Szipl, P.C.
Ohmi Tadahiro
Picard Leo
Rao Sheela S.
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