4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant

Tokumi Kotani

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Method of producing a pyroelectric infrared radiation detector

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Pyroelectric infrared radiation detector and method of producing

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
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