Pyroelectric infrared radiation detector and method of producing

Details Pyroelectric infrared radiation detector and method of producing Pyroelectric infrared radiation detector and method of producing

1994-03-30

1995-11-28

Fields, Carolyn E.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

G01J 502

Patent

active

054710600

ABSTRACT:
A pyroelectric infrared radiation detector for detecting the intensity of infrared radiation with a pyroelectric element. The pyroelectric infrared radiation detector comprises a substrate made of a single crystal material and an infrared radiation detecting structure which comprises a first electrode disposed on the substrate, a pyroelectric thin film disposed on the first electrode, and a second electrode disposed on the pyroelectric thin film for absorption of infrared radiation. The substrate has a recess provided in the upper surface thereof where the infrared radiation detecting structure is seated. A method of producing the pyroelectric infrared radiation detector comprises a first step of forming a first electrode on one surface of a substrate, a second step of forming a pyroelectric thin film on the first electrode, a third step of forming a second electrode on the pyroelectric thin film, a fourth step of providing etching apertures in the first electrode which is open to the substrate, and a fifth step of providing by wet etching process a recess(es) in the surface of the substrate where the first electrode is seated.

REFERENCES:
patent: 4532424 (1985-07-01), Cheung
patent: 5270555 (1993-12-01), Ito et al.
patent: 5286975 (1994-02-01), Ogura et al.
Takayama et al., "Pyroelectric Infrared Array Sensors Made of c-Axis-oriented La-modified PbTiO.sub.3 Thin Films", Sensors and Actuators--A Physical, vol. A22, No. 1/3, Mar. 1990, pp. 508-512.

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