Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate
2007-07-17
2007-07-17
Geyer, Scott B. (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
C438S758000, C257SE21536, C204S192170
Reexamination Certificate
active
10872083
ABSTRACT:
A method and an apparatus for fabricating an integrated circuit entail directing a vapor flux toward a substrate surface from a plurality of directions associated with a plurality of azimuth angles, and selecting a deposition angle of the vapor flux, relative to a normal incidence, to obtain a substantially conformal film. The surface feature can be associated with, for example, one or more vias and/or one or more trenches.
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Barthel John Robert
Karabacak Tansel
Lu Toh-Ming
Geyer Scott B.
Rensselaer Polytechnic Institute
Wolf Greenfield & Sacks
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