4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Todd M. C. Li

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6F2 Trench EDRAM cell with double-gated vertical MOSFET and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Alternating phase shift mask design for high performance...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Alternating phase shift mask design with optimized phase shapes

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Alternating phase shift mask design with optimized phase shapes

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Alternating phase-shift mask rule compliant IC design

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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