4. Registers
  5. Coded record sensors
  6. Particular sensor structure

Ting-Tung Kuo

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Bidirectional MEMS scanning mirror with tunable natural...

Registers – Coded record sensors – Particular sensor structure
Reexamination Certificate

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MEMS scanning mirror with tunable natural frequency

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate

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MEMS scanning mirror with tunable natural frequency

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
Reexamination Certificate

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MEMS scanning mirror with tunable natural frequency

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2771569

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