MEMS scanning mirror with tunable natural frequency

Details MEMS scanning mirror with tunable natural frequency MEMS scanning mirror with tunable natural frequency

2005-11-14

2008-09-16

Pert, Evan (Department: 2826)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

Reexamination Certificate

active

07426066

ABSTRACT:
In one embodiment of the invention, a MEMS structure includes a first electrode, a second electrode, and a mobile element. The first electrode is coupled to a first voltage source. The second electrode is coupled to a second voltage source. The mobile element includes a third electrode coupled to a third voltage source. A steady voltage difference between the first electrode and the third electrode is used to tune the natural frequency of the structure to a scanning frequency of an application. An oscillating voltage difference between the second electrode and the third electrode at the scanning frequency of the application is used to oscillate the mobile element. In one embodiment, the mobile unit is a mirror.

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