4. Brushing, scrubbing, and general cleaning
  5. Machines
  6. Brushing

Timothy S. Culkins

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Apparatus for mechanically cleaning the edges of wafers

Brushing – scrubbing – and general cleaning – Machines – Brushing
Patent

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Method and apparatus for mechanically cleaning the edges of wafe

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent

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Profile ID: LFUS-PAI-P-506080

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