4. Data processing: generic control systems or specific application
  5. Generic control system, apparatus or process
  6. Digital positioning

Tim H. Bossart

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Layout for measurement of overlay error

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Digital positioning
Reexamination Certificate

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Layout for measurement of overlay error

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Digital positioning
Reexamination Certificate

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Raised-lines overlay semiconductor targets and method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate

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Residue free overlay target

Semiconductor device manufacturing: process – Substrate or mask aligning feature
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