4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Tian-Hoe Lim

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Method for densification of CVD carbon-doped silicon oxide...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for removing residue from substrate processing...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for using bypass lines to stabilize gas flow and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of decreasing the k value in sioc layer deposited by...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method of decreasing the K value in SIOC layer deposited by...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2036449

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