4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Thomas Mountsier

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Apparatus and method for physical vapor deposition using an...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method for fabrication of semiconductor interconnect...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Method for fabrication of semiconductor interconnect...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
Reexamination Certificate

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Wafer cooling device

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-1575354

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