4. Radiant energy
  5. Irradiation of objects or material

Thomas Elster

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Device for electrostatic deflection of a particle beam

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electrostatic deflection system for corpuscular radiation

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Illumination condenser for a particle optical projection system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Method and device for exposing a substrate to light

Radiant energy – Irradiation of objects or material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2587609

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