Illumination condenser for a particle optical projection system

Details Illumination condenser for a particle optical projection system Illumination condenser for a particle optical projection system

2005-03-03

2009-10-13

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML

Reexamination Certificate

active

07601969

ABSTRACT:
An illumination condenser for a particle optics projection system is disclosed. The illumination condenser is formed of a magnetic lens comprising a plurality of gaps. The magnetic lens is formed of a sequence of a plurality of partial lenses.

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Optik 100 (1995), pp. 179-187 “Procedures For Minimizing The Aberrations Of Electromagnetic Compound Lenses” D. Preikszas, H. Rose.

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