4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means

Thomas Chisholm

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Charged particle beam apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron beam pattern-writing column

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Magnetic lens system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Profile ID: LFUS-PAI-P-1026666

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