Magnetic lens system

Details Magnetic lens system Magnetic lens system

1987-06-23

1989-02-21

Fields, Carolyn E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250310, 250311, H01J 3710

Patent

active

048067660

ABSTRACT:
A magnetic lens system is provided for a beam of charged particles, comprising a pair of ring-shaped permanent magnets through which the beam passes, the axes of the rings lying coaxially along the beam direction, and the two rings being axially separated and axially oppositely magnetised. A pair of separated conducting focus coils are provided one for each ring, the axes of the focus coils lying coaxially along the beam direction, each focus coil lying within its associated ring, and the focus coils being connected in series opposition to carry an adjustable direct electric current for fine focusing of the beam by the lens without rotation of the focused beam. The lens may provide the fast fine focus adjustment needed to compensate for space charge defocussing produced by changes in beam current.

REFERENCES:
patent: 3560739 (1971-02-01), Wolff
patent: 3812365 (1974-05-01), LePoole
patent: 4701620 (1987-10-01), Okumura et al.

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